Enabling technology for MEMS and nanodevices
Baltes, H, (Henry) · Weinheim [Germany] : Wiley-VCH, 2004
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Baltes, H, (Henry) · Weinheim [Germany] : Wiley-VCH, 2004
National Research Council (U.S.), Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems · Washington, DC : National Academy Press, 1997
Jackson, Mark J · Boca Raton, FL : Taylor & Francis, 2006
Whitaker, Jerry C · Boca Raton, FL : CRC/Taylor & Francis, 2006
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