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Microfabrication and nanomanufacturing
Jackson, Mark J · Boca Raton, FL : Taylor & Francis, 2006
- Publisher
- Boca Raton, FL : Taylor & Francis, 2006
- Physical description
- 401 pages
- ISBN
- 0824724313
- Dewey classification
- 620.5
- Subjects
- Electronic booksIntegrated circuits--Design and constructionMicroelectromechanical systems--Design and constructionMicroelectronics
- Language
- English
Digital copy
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Catalogue record
| Field | Value |
|---|---|
| 001Control number | 18129 |
| 005Date and time of latest transaction | 21 Jun 2005, 11:45 |
| 006Fixed-length data elements – additional material characteristics | m g d |
| 007Physical description fixed field | cr ||| |
| 008Fixed-length data elements | 050613s2006 flu b 001 0 eng |
| 010Library of Congress control number | 2005049275 |
| 020International Standard Book Number (ISBN) | 0824724313 |
| 041Language code | eng |
| 082Dewey Decimal call number | 620.5 |
| 090Local call number | TK7836 Mir 2006 |
| 245Title statement | Microfabrication and nanomanufacturing / [edited by] Mark J. Jackson. |
| 246Varying form of title | Microfabrication and nanomanufacturing [electronic resource] |
| 260Publication, distribution, etc. (imprint) | Boca Raton, FL : Taylor & Francis, 2006 |
| 300Physical description | 401 p. : ill. ; 27 cm. |
| 504Bibliography, etc. note | Includes bibliographical references and index. |
| 506Restrictions on access note | Online version restricted to NUS staff and students only through NUSNET. |
| 538System details note |
|
| 650Subject added entry – topical term |
|
| 700Added entry – personal name | Jackson, Mark J. |
| 730Added entry – uniform title | NANOnetBASE. |
| 999Collection | Downloads |
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