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Fundamentals of semiconductor manufacturing and process control
May, Gary S · [Piscataway] : IEEE Hoboken, N.J : Wiley-Interscience, 2006
- Publisher
- [Piscataway] : IEEE Hoboken, N.J : Wiley-Interscience, 2006
- Physical description
- 463 pages
- ISBN
- 0471784060 (cloth : alk. paper);9780471784067
- Dewey classification
- 621.38152
- Subjects
- Integrated circuits--Design and constructionProcess control--Statistical methodsSemiconductors--Design and construction
- Language
- English
Digital copy
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Catalogue record
| Field | Value |
|---|---|
| 001Control number | 14016 |
| 005Date and time of latest transaction | 12 Jan 2011, 10:11 |
| 008Fixed-length data elements | 050928s2006 njua b 001 0 eng |
| 010Library of Congress control number | 2005028448 |
| 015National bibliography number | GBA627486 bnb |
| 016National bibliographic agency control number | 013414729 Uk |
| 020International Standard Book Number (ISBN) |
|
| 035System control number | (OCoLC)ocm61821738 |
| 040Cataloging source | DLC DLC UKM BAKER C#P COO DLC |
| 041Language code | eng |
| 042Authentication code | pcc |
| 050Library of Congress call number | TK7871.85 .M379 2006 |
| 082Dewey Decimal call number | 621.38152 Fun-C |
| 100Main entry – personal name | May, Gary S. |
| 245Title statement | Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. |
| 260Publication, distribution, etc. (imprint) | [Piscataway] : IEEE ; Hoboken, N.J. : Wiley-Interscience, 2006 |
| 300Physical description | xix, 463 p. : ill. ; 25 cm. |
| 504Bibliography, etc. note | Includes bibliographical references and index. |
| 650Subject added entry – topical term |
|
| 700Added entry – personal name | Spanos, Costas J. |
| 999Collection | Downloads |
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